JPH0313465Y2 - - Google Patents

Info

Publication number
JPH0313465Y2
JPH0313465Y2 JP1986070001U JP7000186U JPH0313465Y2 JP H0313465 Y2 JPH0313465 Y2 JP H0313465Y2 JP 1986070001 U JP1986070001 U JP 1986070001U JP 7000186 U JP7000186 U JP 7000186U JP H0313465 Y2 JPH0313465 Y2 JP H0313465Y2
Authority
JP
Japan
Prior art keywords
partition wall
exhaust
casing
air supply
opening area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986070001U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62181519U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070001U priority Critical patent/JPH0313465Y2/ja
Publication of JPS62181519U publication Critical patent/JPS62181519U/ja
Application granted granted Critical
Publication of JPH0313465Y2 publication Critical patent/JPH0313465Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1986070001U 1986-05-12 1986-05-12 Expired JPH0313465Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070001U JPH0313465Y2 (en]) 1986-05-12 1986-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070001U JPH0313465Y2 (en]) 1986-05-12 1986-05-12

Publications (2)

Publication Number Publication Date
JPS62181519U JPS62181519U (en]) 1987-11-18
JPH0313465Y2 true JPH0313465Y2 (en]) 1991-03-27

Family

ID=30911236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070001U Expired JPH0313465Y2 (en]) 1986-05-12 1986-05-12

Country Status (1)

Country Link
JP (1) JPH0313465Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116300U (ja) * 1982-02-02 1983-08-08 日本電気株式会社 コンベヤ装置
JPS5994840A (ja) * 1982-11-22 1984-05-31 Hitachi Plant Eng & Constr Co Ltd ウエハ搬送装置

Also Published As

Publication number Publication date
JPS62181519U (en]) 1987-11-18

Similar Documents

Publication Publication Date Title
US5401212A (en) Environmental control system
US5195922A (en) Environmental control system
CN1321294C (zh) 薄板状电子组件清洁搬运装置及薄板状电子产品制造系统
US5261935A (en) Clean air apparatus
KR960004224B1 (ko) 연결식 클리인공간장치
KR100449975B1 (ko) 반도체 장치용 크린룸
KR100524359B1 (ko) 클린 룸용의 물품 보관 설비
US5219464A (en) Clean air apparatus
JPH1096333A (ja) クリーンルーム
JP3225344B2 (ja) 処理装置
JP3774277B2 (ja) 被処理基板の搬送方法及び処理システム
US5429642A (en) Method for transferring wafers from one processing station to another sequentially and system therefor
JP3884570B2 (ja) 基板処理装置
KR102570523B1 (ko) 기판 처리 장치
JPH0313465Y2 (en])
JP4684683B2 (ja) クリーンブースおよびそのクリーンブースを用いた作業システム
JPH03177732A (ja) 半導体の無塵化製造システム
JPH09260226A (ja) 半導体製造システム
JPH0541553Y2 (en])
JP2001284426A (ja) ウェハの昇降装置
JPH06100356B2 (ja) ライン形クリーンキューブ装置
JP3086910B2 (ja) 半導体処理装置
JPH0437614Y2 (en])
JP3416397B2 (ja) 処理システム
JPH03125838A (ja) 被加工物搬送用ユニット型クリーンチューブ